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If specific inlet challenge(s) and/or inlet measurements are required
SEMI E87-0707 (technical revision)
This Standard defines terms commonly used in the calibration of mass flow controllers (MFC) and mass flow meters (MFM)
SEMI G5-85 (technical revision)
F12100 - SEMI F121 - Guide for Evaluating Metrology for Particle Precursors in Ultrapure Water Revision:SEMI F121-0923 - Current video filarThis Guide provides a performance based definition of metrology that can be used to measure particle precursors in ultrapure water (UPW). This Guide includes a testing methodology and criteria for qualifying measurement techniques for quantifying particle precursor concentrations in UPW. Particle precursors are defined as dissolved compounds that can form particles when dried on a wafer surface. This definition was developed by the UPW International
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US$ 2999.50
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